Chemical Vapor Infiltration (CVI) Systems
Chemical vapor infiltration (CVI) is a chemical vapor deposition (CVD) process that is performed at low pressures to allow for coating the internal surfaces of a porous material. Using heat and low pressure, precursor vapors penetrate the pores / fibers of the material and deposit to form a conformal coating on the internal surfaces.
Our CVI platform is used to coat the internal surfaces of porous materials having complex shapes and geometries. Multiple systems are in production for coating biocompatible porous material used in medical implants and aerospace components.
- Dual or multi chamber configuration for improved productivity
- Substrate temperatures > 1000 degrees Celsius
- Cascade temperature control using external (furnace) and internal (process) thermocouples for real time continuous in-situ control of temperature profiles
- CVDWinPrC™ system control software for real time process control, data logging, and recipe editing
- Process pressure control with automatic pressure adjustment during the process to control infiltration and uniformity
- Wet scrubbing and neutralization treatment of hazardous process exhaust gasses