CVI Systems

Chemical Vapor Infiltration (CVI) Systems


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Chemical vapor infiltration (CVI) is a chemical vapor deposition (CVD) process that is performed at low pressures to allow for coating the internal surfaces of a porous material. Using heat and low pressure, precursor vapors penetrate the pores / fibers of the material and deposit to form a conformal coating on the internal surfaces.

Our CVI platform is used to coat the internal surfaces of porous materials having complex shapes and geometries.


  • Dual or multi chamber configuration for improved productivity
  • Substrate temperatures > 1000 degrees Celsius
  • Cascade temperature control using external (furnace) and internal (process) thermocouples for real time continuous in-situ control of temperature profiles
  • CVDWinPrC™ system control software for real time process control, data logging, and recipe editing
  • Process pressure control with automatic pressure adjustment during the process to control infiltration and uniformity
  • Wet scrubbing and neutralization treatment of hazardous process exhaust gasses

powered by CVDWinPrC

Operated through our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check and create new recipes, and view realtime or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.