Research & Development Process
FirstNano® is CVD Equipment Corporation's research and development (R&D) brand of products. Various academic research centers, industry leaders, and government research labs worldwide have purchased the system and are employing it currently in their research.
CVD Equipment Corporation specializes in the manufacture of innovative, high quality process equipment suitable for the synthesis of a variety of thin films, carbon nanotubes, nanowires, LEDs, MEMS, nanostructures, nanomaterials, and other applications. The FirstNano® line of systems are applicable to nanoscale research that intersects cross-functional disciplines in semiconductor, applied physics, biotechnology, chemical, and mechanical engineering fields.
Materials & Processes
Graphene
Carbon Nanotubes (CNTs)
Transition Metal Dichalcogenides
Rapid Thermal Processing (RTP)
Semiconducting Nanowires
CMOS/MEMS/IC
Chemical Vapor Infiltration (CVI)
Fluidized Bed CVD (FBCVD)
Metal Organic CVD (MOCVD)
Plasma Enhanced CVD (PECVD)
Selenization/Sulfurization (SAS)
R&D Process Systems
EasyTube® 101 (25 mm x 50 mm Substrate)
EasyTube® 2000 (50 mm x 50 mm Substrate)
EasyTube® 3000 (100 mm x 100 mm Substrate)
