R&D Process

Research & Development Process

FirstNano® is CVD Equipment Corporation's research and development (R&D) brand of products. Various academic research centers, industry leaders, and government research labs worldwide have purchased the system and are employing it currently in their research.
CVD Equipment Corporation specializes in the manufacture of innovative, high quality process equipment suitable for the synthesis of a variety of thin films, carbon nanotubes, nanowires, LEDs, MEMS, nanostructures, nanomaterials, and other applications. The FirstNano® line of systems are applicable to nanoscale research that intersects cross-functional disciplines in semiconductor, applied physics, biotechnology, chemical, and mechanical engineering fields.

Materials & Processes

Graphene

Graphene application

Carbon Nanotubes (CNTs)

CNT-800x-circle

Transition Metal Dichalcogenides

TMD-50kx-circle

Rapid Thermal Processing (RTP)

RTP-circle

Semiconducting Nanowires

semiconducting-nanowires-circle

CMOS/MEMS/IC

CMOS-MEMS-IC-circle

Chemical Vapor Infiltration (CVI)

Metal Foam

Fluidized Bed CVD (FBCVD)

FBCVD

Metal Organic CVD (MOCVD)

MOCVD-circle

Plasma Enhanced CVD (PECVD)

PECVD-circle

Selenization/Sulfurization (SAS)

SAS-circle

R&D Process Systems

EasyTube® 101 (25 mm x 50 mm Substrate)

ET101 with Burnbox

EasyTube® 2000 (50  mm x 50 mm Substrate)

EasyTube® 2000 Process Equipment

EasyTube® 3000 (100  mm x 100 mm Substrate)

ET-3000

EasyTube® 3000EXT (150  mm x 150 mm)

EasyTube® 3000EXT

EasyTube® 6000 (4 Process Tubes)

EasyTube® 6000 MultiTube

EasyTube® 6308 (3 Process Tubes)

EasyTube® 6308 Multi-Tube