R&D Process

Research & Development Process

FirstNano® is CVD Equipment Corporation's research and development (R&D) brand of products. Various academic research centers, industry leaders, and government research labs worldwide have purchased the system and are employing it currently in their research.
CVD Equipment Corporation specializes in the manufacture of innovative, high quality process equipment suitable for the synthesis of a variety of thin films, carbon nanotubes, nanowires, LEDs, MEMS, nanostructures, nanomaterials, and other applications. The FirstNano® line of systems are applicable to nanoscale research that intersects cross-functional disciplines in semiconductor, applied physics, biotechnology, chemical, and mechanical engineering fields.

Materials & Processes

Carbon Nanotubes (CNTs)

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Transition Metal Dichalcogenides

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Rapid Thermal Processing (RTP)

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Semiconducting Nanowires

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Chemical Vapor Infiltration (CVI)

opens in a new windowMetal Foam

Fluidized Bed CVD (FBCVD)

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Metal Organic CVD (MOCVD)

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Plasma Enhanced CVD (PECVD)


Selenization/Sulfurization (SAS)


R&D Process Systems

EasyTube® 101 (25 mm x 50 mm Substrate)

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EasyTube® 2000 (50  mm x 50 mm Substrate)

opens in a new windowEasyTube® 2000 Process Equipment

EasyTube® 3000 (100  mm x 100 mm Substrate)


EasyTube® 3000EXT (150  mm x 150 mm)

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EasyTube® 6000 (4 Process Tubes)

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EasyTube® 6308 (3 Process Tubes)

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Materials Gallery


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