Semiconductor Crystal Growth System
Semiconductor crystals such as Si, SiC, GaN, are widely used in Solar, Power Electronics and Optical applications. Different methods and equipment have been used to grow these crystals from melt or vapor.
We design and manufacture crystal growth system for R&D and production. The crystal can grow from melt or vapor with chamber size from 2” to over 12”, using resistance heating to 1200 °C, or induction heating to over 2000 °C.
Please contact us for more information.
powered by CVDWinPrC™
Operated through our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check and create new recipes, and view realtime or saved process data.
The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.