Crystal Growth Systems

Semiconductor Crystal Growth System

Crystal Growth System

Our Vertical Bridgman Crystal Growth system is an advanced process tool for the growth of bulk single crystal ingots. The system is optimized for controlled process development and user safety.

The Vertical Bridgman Crystal Growth system includes two independently controlled furnace subsystems; the melting and growth furnaces. A linear drive mechanism provides automated precision movement of the furnace assembly through the process zones between a start position and stop position at a programmable velocity profile with minimal vibration.

A high slew-rate mode permits quick setup and removal of the crystal growth crucible or ampoule. A rotary drive subsystem rotates the crucible or ampoule during the process to improve thermal uniformity.

Bulk single crystals, including:

Cd1-XZnXTe | CdSe | CdTe | Mg | ZnS | ZnSe | ZnSe:Cr | ZnTe | Zn1-XMgXSe | Zn1-XMgXSe:Cr

SYSTEM FEATURES & OPTIONS

  • CVDWinPrC™ system control software for real time process control, data logging, and recipe editing
  • 15 mm crystal diameter, up to 100 mm in length
  • Linear motion system
  • Quartz growth chamber
  • Rotary drive
  • Melting furnace: three (3) zone resistance furnace for temperatures up to 1200 °C
  • Temperature control loops are PID controlled and user changeable
  • Growth Furnace: three (3) zone resistance furnace for temperatures up to 1200 °C
  • Temperature control loops are PID controlled and user changeable
  • Vacuum system
  • Proprietary real-time cascade process temperature control
  • Mass flow controlled UHP gas lines
  • Comprehensive software and hardware safety interlocks
  • One (1) year warranty
  • Customer specified crystal diameter
  • Customer specified crystal length
  • EasyPanel™ UHP gas panels for argon, nitrogen, helium, oxygen

powered by CVDWinPrC

Operated through our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check and create new recipes, and view realtime or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.