Crystalline compound semiconducting materials form the foundation of many devices that are widely used in everyday life, including complementary metal-oxide-semiconductor (CMOS) integrated circuits (ICs), optoelectronic and photonic devices, and micro-electro-mechanical systems (MEMS). Chemical vapor deposition (CVD) is the most widely adopted industrial technique for producing semiconducting thin films and complex layered micro- and nano-structures. The CVD process is versatile and can be tuned to produce homoepitaxial and heteroepitaxial monocrystalline materials as well as polycrystalline and amorphous materials. A high level of dopant control can be readily achieved for
Semiconductor materials are widely used in optoelectronics devices such as light emitting diodes (LEDs) and infrared detectors.
Light Emitting Diodes
Blue LEDs used in white light applications are typically made from gallium nitride and its ternary alloys with indium, aluminum etc. New materials such as ZnO and ZnSe are currently being studied for the next generation LEDs.
We provide MOCVD equipment for GaN and ZnO research as well as our HCl Dry Etcher to support multiple MOCVD machines in LED production.
HgCdTe (mercury cadmium telluride, MCT) is the most commonly used