Vacuum Coating Technology
Low pressure chemical vapor deposition (LPCVD) coatings are used for uniform and conformal coatings. LPCVD has excellent step coverage and throwing power, allowing for the coating of internal surfaces of step-like or porous materials. LPCVD coatings are dense and high-purity.
We apply many different vacuum system technologies depending on the requirements of the process. Vacuum systems are selected based on the types of chemistries involved and process pressure requirements. Our vacuum system solutions are designed to be low maintenance, robust, and reliable. Vacuum systems are integrated into a central control and safety system. Recipes are programmed and system control is automated through our proprietary real-time instrument control, data logging, and process editing software suite, CVDWinPRC™.
Brookhaven National Lab's video shows the NSLS-II Multilayer Laue Lens Deposition System in action. Ray Conley, the Group Leader for Optics Fabrication Group at BNL explains the motion control capabilities. opens in a new windowRead the articleopens PDF file for more information about this system.
System Features & Options
- CVDWinPrC™ system control software for real time process control, data logging, and recipe editing
- LPCVD at millitorr pressures, with high vacuum (HV) or ultra-high vacuum (UHV) base pressures available depending on end user requirements.
- LPCVD of corrosive processes are possible with our vacuum systems. We have 30 + years of equipment design and engineering that we can apply to your process to ensure the vacuum system technology chosen will meet or exceed your expectations. Consult factory for more information or to request a quote.