Multi-Chamber Tools

Multi-Chamber Technology

CVDBondCoat™ Systemopens IMAGE file Multi-chamber process systems allow for parallel or sequential processing for improved throughput and productivity. Our multi-chamber systems are designed to allow for preventative maintenance to be performed on one chamber while the other chambers continue to process, maximizing up-time and utilization.

All chambers are integrated into a central control and safety system. Recipes are programmed and system control is automated through our proprietary real-time instrument control, data logging, and process editing software suite, CVDWinPRC™.

System Features & Options

  • CVDWinPrC™ system control software for real time process control, data logging, and recipe editing
  • Parallel or sequential processing, chamber-to-chamber
  • Central control and safety system
  • Preventative maintenance on one chamber while depositing on others
  • Chambers can be configured for a vast range of different chemical vapor deposition processes. Consult factory for details or to request a quote.

The images shown are examples of many CVD systems we design and manufacture in-house for innovators working on next generation process and material development. We have customers worldwide at universities, governmental labs, start-ups, and fortune 500 companies.