Exhaust Abatement

Exhaust Abatement Technology

Industrial Exhaust AbatementChemical vapor deposition processes often require the use of flammable, pyrophoric, toxic, and corrosive gases / vapors. These need to be handled properly to ensure the safety of the users, and the post process effluent gases need to be properly treated and neutralized to meet environmental safety standards.

Our industrial exhaust conditioning and abatement systems automatically wet scrub and neutralize corrosive gases / vapors. When purchased with our CVD reactor systems, they are integrated into the central control and safety system for turnkey operation. Exhaust gas conditioning is monitored through our proprietary real-time instrument control, data logging, and process editing software suite, CVDWinPRC™.

Our process exhaust abatement systems provide proper safety to plant and personnel in the handling of hazardous gases. We have taken extensive measures to provide fail-safe designs and combine them with forward thinking features in an effort to offer a safe, versatile product for specialty gas exhaust requirements.

System Features & Options

  • Automatic conditioning of exhaust gases / vapors
  • Pyrolyzer
  • Wet Scrubber
  • Automatic pH Neutralization
  • Can be interfaced with other process equipment requiring exhaust gas abatement
  • A range of exhaust abatement systems are available for handling flammable, explosive, pyrophoric, toxic, and corrosive exhausts. Consult factory for more information or to request a quote.

The images shown are examples of many CVD systems we design and manufacture in-house for innovators working on next generation process and material development. We have customers worldwide at universities, governmental labs, start-ups, and fortune 500 companies.