CVD Equipment Corporation       OUR DIVISIONS/PRODUCTS:

CVD Equipment Corportion

enabling tomorrow's technologies™


Partial Customer List (alphabetically left to right)

Architectural Engineering

AGI Abbie Gregg, Inc.  M+W Group

Industry Customers

acer aglient technologies
alcatel lucent asml
bae systems bf goodrich
bp solar diamond innovations
ecd ovonics emcore
Foxconn general electric
Honeywell hp invent
ibm infinite power solutions
intel lite-on semiconductor corp
Mainstream Engineering Corporation motorola
National Semiconductor nextreme
Northrop Grumman Corporation Nuclear Fuel Services
OptiComp Corporation Phillips Lumileds
Pratt and Whitney RF Nano
sharp superpower inc
tokyo electronics tyco
xerox

University, Government and Industry Research Laboratories

nasa ames research center Auburn University
brookhaven national labs Brooklyn College
carnegie mellon Case Western Reserve University
cornell university Florida State University
Georgia Institute of Technology harvard university
Indian Institute of Science louisiana tech university
los alamos national laboratory michigan state university
massachusetts institute of technology NASA Glenn Research Center
Naval Research Laboratory Norfolk State University
penn state
RTI International tuskegee university
university at albany uc davis in california
University of California, Santa Barbara University of Connecticut
university of cincinnati university of central florida
University of New Brunswick, Canada University of Puerto Rico
university of rochester University of Texas at Dallas
yale university

First Nano's EasyTube® 3000

Easy Tube 3000

Most advanced tool for the synthesis of graphene...
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CVD's Fabricated Quartzware - Wafer Boats

Fabricated Quartzware

Standard and customized wafer boats for various wafer sizes...
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Conceptronic's Reflow Ovens

reflow ovens

Printed circuit board repair station designed for component rework...
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SDC - CiphercoN™ Auto Gas Cabinet

Safest and most reliable Ultra-High-Purity (UHP) specialty gas equipment...
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First Nano's EasyTube® 2000

Turnkey solution for nanomaterial synthesis...
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CVD's Rapid Thermal Process Chamber

RTP Process Chamber

Infrared Heated Process Chamber...
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First Nano's EasyTube® 6000

easy tube 6000

Multi Stack CVD system for Carbon Nanotubes (CNT), Nanowires, Graphene...
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EasyExhaust™ System

easy exhaust system

Provides proper handling of hazardous effluents from nanotechnology,s...
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CVD's Liquid Phase Epitaxial Reactor System

CVD's Liquid Phase Epitaxial Reactor System

Provides optimum control over III-V and II-VI wafer processing...
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Rapid Thermal Processing - Chamber Lid

Rapid Thermal Processing - Chamber Lid

Infrared lamp array on the RTP chamber lid...
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First Nano's EasyTube® 2000 - Hot Loader

First Nano's EasyTube™ 2000 - Hot Loader

Hot Loader to Load Sample into a Pre-Heated Chamber....
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SDC - Flexgas™ Mini Valve Manifold Box

SDC - Flexgas Mini Valve Manifold Box

Designed to cover a wide range of cylinder gas delivery application...
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CVD's LPCVD - End Cap Assembly

CVD's LPCVD - End Cap Assembly

Seals the loading end of the process tube for both atmospheric and low pressure processes...
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LPCVD - Hot Wall Furnace Chamber

LPCVD - Hot Wall Furnace Chamber

Boat of wafers loading into Hot Wall Furnace Chamber...
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UHVCVD - Multi-Chamber Cluster Tool

UHVCVD - Multi-Chamber Cluster Tool

Used for the deposition of high-purity polysilicon...
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UHVCVD - Chamber Cluster Tool

UHVCVD - Chamber Cluster Tool

Robotic wafer transfer system showing load lock and transfer chamber...
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UHVCVD - Chamber Cluster Tool - Quartz Holder

UHVCVD - Chamber Cluster Tool - Quartz Holder

Substrate loaded onto quartz wafer holder and thermal baffle...
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PECVD - Process Chamber

PECVD - Process Chamber

Contains the RF Matching Unit delivering power to the upper electrode within...
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MOCVD - Metalorganic CVD System

Metalorganic CVD System

For compound semiconductors material deposition...
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Multi-Chamber Cluster System

Multi-Chamber Cluster System

Consists of a load lock, transfer chamber, and up to 3 independent process modules...
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Cluster System - Sputter Etch Chamber

Cluster System- Sputter Etch Chamber

Sputter Etch chamber showing wafer platen and showerhead...
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Reel to Reel CVD System

Reel to Reel CVD System

Used for deposition of high quality films onto continuous flexible substrate material...
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Reel to Reel - Chamber with Multi-Zone Susceptor

Reel to Reel - Chamber with Multi-Zone Susceptor

Process chamber with multi-zone infrared susceptor heating system...
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Reel to Reel Processing - Hot Chamber

Reel to Reel Processing - Hot Chamber

Flexible film being processed on an infrared heated susceptor...
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Reel to Reel Processing - Hot Chamber

Reel to Reel Processing - Hot Chamber

Flexible film being processed on an infrared heated susceptor...
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ALD - Atomic Layer Deposition System - Process Chamber

Atomic Layer Deposition System - Process Chamber

Deposits ultra-thin uniform layers onto substrates...
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Atomic Layer Deposition System - Multi-head Chamber

Isolated Showerhead/Heater with ALD systems...
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LPE - Liquid Phase Epitaxial Reactor System - Loadlock

Liquid Phase Epitaxial Reactor System - Loadlock

Loading tray to transfer to and from the glove box...
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LPE - Liquid Phase Epitaxial Reactor System - Inert Gas Spray Gun

Inert gas spray gun within glove box allows for surface cleaning...
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LPE - Liquid Phase Epitaxial Reactor System - 3 Zone Rolling Furnace

Rolling furnace in retracted system...
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RTP - Rapid Thermal Processing - Chamber

Rapid Thermal Processing - Chamber

Provides extremely rapid heating and cooling of substrates...
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RTP - Rapid Thermal Processing - Infrared Lamp

Rapid Thermal Processing - Infrared Lamp

Provides rapid and uniform heating...
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RTP - Rapid Thermal Processing - Single Wafer Cantilever Loading Station

Rapid Thermal Processing - Single Wafer Cantilever Loading Station

Wafer on quartz loading arm being introduced into...
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RTP - Rapid Thermal Processing - Underpower Hot Process Chamber

Hot Process Chamber

Pyrolizing furnace and a water scrubbing system...
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Hydrogen Chloride Etching System

Hydrogen Chloride Etching System

Gas control and delivery system for Hydrogen Chloride etching system...
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Quartz Shop - Custom Quartz Fabricated

Quartz Shop - Custom Quartz Fabricated

Custom quartzware being fabricated using a high temperature lathe...
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Fabricated Quartzware - Quartz Shop

Fabricated Quartzware

Flame polishing of quartz component to provide the proper finish...
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Bubbler/Flash Evaporator

Bubbler/Flash Evaporator

Stainless Steel Bubbler/Flash Evaporator for delivering saturated gases to...
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Motion Control/Vacuum Chamber - Wafer Transfer Chamber

Motion Control/Vacuum Chamber- Wafer Transfer Chamber

4 port UHV Wafer Transfer Chamber...
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Motion Control/Vacuum Chamber - Wafer Transfer Chamber & Sputter Etch Chamber

Bare wafer transfer/chamber...
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