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About CVD Equipment Corporation

CVD Equipment Corporation offers a variety of process and support equipment including Chemical vapor deposition systems, gas/liquid delivery cabinets, gas panels and related gas abatement systems. Our products are used globally for both R&D and production facilities across many industries such as the semiconductor, MEMS, Solar, Alternative Energy, Nanotechnology, optoelectronics, surface coating and many more.

We are a vertically integrated manufacturer; we bring in raw metal and ship out finished systems. Our strong system design and manufacturing capabilities have positioned us for fast R&D development and rapid transfer to production. We have expanded our Application Lab to develop turnkey solutions for the growing Solar and Nanotechnology markets.

CVD Equipment Corporation’s headquarter and Application Lab are located in Long Island, NY.

EasyTube 2000

easy tube 2000

Turnkey solution for nanomaterial synthesis
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EasyTube 3000

easy tube 3000

The most advanced tool for the synthesis of nanotube
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EasyTube™ 6000

easy tube 6000

Offered for Carbon Nanotubes (CNT), Nanowires, Oxidation, Annealing,...
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LPCVD - High Purity Gas Delivery System

lpcvd gas delivery system

Including Mass Flow Controllers, Pneumatically operated valves...
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LPCVD - End Cap Assembly

lpcvd end cap assembly

Seals the loading end of the process tube for both atmospheric and low pressure processes...
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LPCVD - Vacuum Pump

lpcvd vacuum pump

Piston pump to evaculate the loadlock to equalize pressure with...
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LPCVD - Hot Wall Furnace Chamber

lpcvd boat of wafers

Boat of wafers loading into Hot Wall Furnace Chamber...
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UHVCVD - Multi-Chamber Cluster Tool

uhvcvd multi chamber tool

Dual chamber UHVCVD/LPCVD for Si/SiGe epitaxial deposition...
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UHVCVD - Chamber Cluster Tool

uhvcvd chamber cluster tool

Robotic wafer transfer system showing load lock and transfer chamber...
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UHVCVD - Chamber Cluster Tool - Quartz Holder

uhvcvd quartz holder

Substrate loaded onto quartz wafer holder and thermal baffle...
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PECVD - Process Chamber

PECVD Process Chamber

Contains the RF Matching Unit delivering power to the upper electrode within...
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Metalorganic CVD System

metalorganic cvd system

For compound semiconductors material deposition...
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Metalorganic CVD System - Chamber

Metalorganic CVD System - Chamber

Offers Stainless Steel or Quartz Chamber...
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Multi-Chamber Cluster System

multi chamber cluster system

Consists of a load lock, transfer chamber, and up to 3 independent process modules...
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Reel to Reel CVD System

Reel to Reel CVD System

Used for deposition of high quality films onto continuous flexible substrate material...
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Reel to Reel - Chamber with Multi-Zone Susceptor

Reel to Reel - Chamber with Multi-Zone Susceptor

Process chamber with multi-zone infrared susceptor heating system...
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Reel to Reel Processing - Hot Chamber

Reel to Reel Processing - Hot Chamber

Flexible film being processed on an infrared heated susceptor...
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Reel to Reel Processing - Infrared Heated Susceptor

Infrared Heated Susceptor shows portion of Reel to Reel...
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Atomic Layer Deposition System - Process Chamber

Atomic Layer Deposition System - Process Chamber

Deposits ultra-thin uniform layers onto substrates...
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Atomic Layer Deposition System - Multi-head Chamber

Multi-head Chamber

Isolated Showerhead/Heater in our ALD systems...
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Liquid Phase Epitaxial Reactor System

Liquid Phase Epitaxial Reactor System

Provides optimum control over III-V and II-VI wafer processing...
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Liquid Phase Epitaxial Reactor System - Loadlock

LPE Loadlock

LPE with loading tray to transfer to and from the glove box...
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Liquid Phase Epitaxial Reactor System - Airgun with Glove Ports

LPE Airgun with Glove Ports

Inert gas spray gun within glove box...
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Liquid Phase Epitaxial Reactor System - 3 Zone Rolling Furnace

LPE 3 Zone Rolling Furnace

Rolling furnace in retracted system.
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Rapid Thermal Processing - Chamber

Rapid Thermal Processing - Chamber

Provides extremely rapid heating and cooling of substrates...
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Rapid Thermal Processing - Infrared Lamp

Rapid Thermal Processing - Infrared Lamp

Provides rapid and uniform heating...
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Rapid Thermal Processing - Single Wafer Cantilever Loading Station

Rapid Thermal Processing - Cantilever Loading Station

Wafer on quartz loading arm being introduced into...
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Rapid Thermal Processing - Hot Process Chamber

Hot Process underpower from end view...
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Rapid Thermal Processing - Chamber Lid

chamber lid

Infrared lamp array on the RTP chamber lid...
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Hydrogen Chloride Etching System

Hydrogen Chloride Etching System

Process Chamber and Operator control station for Hydrogen Chloride Etching Systems...
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Customized System - Deluge System

Deluge System

Provides protection within explosive environments using infrared sensors....
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Customized System - RTP Process Chamber

RTP Process Chamber

Infrared Heated Process Chamber.....
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Supporting Equipment - Gas Cabinet

Gas Cabinet

Designed to cover a wide range of cylinder gas delivery applications...
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Fabricated Quartzware - Wafer Boats

Fabricated Quartzware - Wafer Boats

Standard and customized wafer boats for various wafer sizes...
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Quartz Shop - Custom Quartz Fabricated

Quartz Shop - Custom Quartz Fabricated

Custom quartzware being fabricated using a high temperature lathe...
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Quartz Shop - Custom Quartz Fabricated

Quartz Shop - Flame Polishing Quartz

Flame polishing of quartz component to provide the proper finish...
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Bubbler/Flash Evaporator

Bubbler/Flash Evaporator

Stainless Steel Bubbler/Flash Evaporator for delivering saturated gases to...
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Motion Control/Vacuum Chamber - Wafer Transfer Chamber

4 port UHV Wafer Transfer Chamber...
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Chamber - Wafer Transfer Chamber & Sputter Etch Chamber

Bare wafer transfer/ chamber...
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1860 Smithtown Avenue | Ronkonkoma, NY 11779 | Tel 631.981.7081 | Fax 631.981.7095
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